Multicusp negative ion source
نویسندگان
چکیده
منابع مشابه
Multicusp Ion Source for Induction Linac Applications
At LBNL we are investigating the use of gaseous ion sources for induction linac applications such as heavy ion inertial fusion. Typical requirements for the ion source is to produce 20 μs pulses with a rise-time of 2 μs. The current density should be greater than 100 mA/cm2 at a duty cycle of 10 Hz [1]. Noble gases such as krypton, neon and xenon will be used. The source used for the measuremen...
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A new ion source will be designed and manufactured for the CYCLONE30 commercial cyclotron with a much advanced performance compared with the previous one. The newly designed ion source has more plasma density, which is designed to deliver an H beam at 30 keV. In this paper numerical simulation of the magnetic flux density from permanent magnet used for a multicusp ion source, plasma confinement...
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The multicusp ion source has the capability of producing large volumes of uniform, quiescent, high density plasmas. Due to the versatility of the multicusp source, a plasma chamber suited for plasma immersion ion implantation (PIII) was readily constructed. Conventional PIII pulses the bias voltage applied to the substrate which is immersed in a CW mode plasma. However, in the interest of findi...
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A multicusp ion source with modular design was developed at LBNL for production of H− ions. The source consists of a front plate, two multicusp front chambers, a quartz flange with external 3-loop RF antenna and a rear multicusp chamber. The source has LaB6 sputtering target at the rear chamber to lower the work function of the surfaces by coating them with LaB6 and an external cesium oven on t...
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2014 A pulsed source for Cs-ions has been constructed as part of a sputter ion source in Hortig geometry. A beam of Cs-ions is extracted from a tungsten surface ionizer and bunched into pulses a few ns wide by a combination of velocity and path-of-flight modulation. It is expected that such a beam will produce intense pulses of negative ions having pulse widths in the ns range. REVUE DE PHYSIQU...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 1980
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.1136302